Metal fusion bonding – Process – With shaping
Reexamination Certificate
2011-02-22
2011-02-22
Ward, Jessica L (Department: 1793)
Metal fusion bonding
Process
With shaping
C204S298030, C204S298120
Reexamination Certificate
active
07891536
ABSTRACT:
A PVD target structure for use in physical vapor deposition. The PVD target structure includes a consumable slab of source material and one or more detectors for indicating when the slab of source material is approaching or has been reduced to a given quantity representing a service lifetime endpoint of the target structure. Each detector includes an enclosure which may be made by forming a plurality of bores in a bulk material and separating the bulk material into a plurality of discrete enclosure units each including one of the bores. Alternatively, the enclosure of the detector may be made using a mold having one or more mold members and an extrusion, casting, electrical chemical plating, and/or sheet forming method.
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Hsiao Yi-Li
Sheu Lawrance
Wang Jean
Yu Chen-Hua
D'Aniello Nicholas P
Duane Morris LLP
Taiwan Semiconductor Manufacturing Co. Ltd.
Ward Jessica L
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