Purified alkoxide and process for purifying crude alkoxide

Details Purified alkoxide and process for purifying crude alkoxide Purified alkoxide and process for purifying crude alkoxide

1999-03-15

2000-08-08

Nazario-Gonzalez, Porfirio

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

556 54, 556 76, 556 81, 556182, 556400, 568 8, 568 14, C07F 900, C07F 700, C07F 506

Patent

active

061004154

ABSTRACT:
A purified alkoxide from which volatile impurities causing polymerization and degradation of the alkoxide are removed to extremely low concentrations. The purified alkoxide can be obtained by distilling a crude alkoxide and stripping the distilled liquid alkoxide by applying ultrasonic vibration while passing an inert gas through the liquid alkoxide. A high quality thin insulating film excellent in flatness with few defects such as voids can be obtained by using the purified alkoxide of the present invention as a CVD material.

REFERENCES:
patent: 5575901 (1996-11-01), Hulme et al.

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