Purification of nitrogen trifluoride atmospheres

Details Purification of nitrogen trifluoride atmospheres Purification of nitrogen trifluoride atmospheres

1978-06-08

1979-05-29

Hearn, Brian

Gas separation

Means within gas stream for conducting concentrate to collector

55 71, 55 75, 423406, 423489, B01D 5302

Patent

active

041565983

ABSTRACT:
This invention relates to an improvement in a process for purifying nitrogen trifluoride atmospheres generally contaminated with nitrous oxide, water, and dinitrogen difluoride. The improvement for extending adsorber life resides in reducing the dinitrogen difluoride content in the atmosphere to less than 0.03% by volume prior to passing the atmosphere through the adsorber.

REFERENCES:
patent: 3043662 (1962-07-01), Lipscomb
patent: 3235474 (1966-02-01), Tompkins et al.
patent: 3356454 (1967-12-01), Tompkins et al.
patent: 4091081 (1978-05-01), Woytek
Colburn, C. et al., "Difluorodiazine" in J. Am. Chem. Soc., vol. 81, (1959), pp. 6397, 6398.

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