Purification of electronic specialty gases by vapor phase transf

Details Purification of electronic specialty gases by vapor phase transf Purification of electronic specialty gases by vapor phase transf

1997-02-03

1999-12-21

Manoharan, Virginia

Distillation: processes, separatory

With measuring, testing or inspecting

62 555, 62617, 62620, 75 1012, 75 1029, 95241, 203 2, 423210, 423488, B01D 342, F25V 308

Patent

active

060044330

ABSTRACT:
A method for purifying liquefied corrosive gases of metallic impurities is described. The principle for this purification method relies on vapor-phase transfilling the vapor phase from a source container into a receiving container. This method has been observed to decrease metal concentrations by a factor of at least 1000 and decreases the metallic impurity levels in the resulting condensate. The vapor transfer is accomplished by controlled differential pressure rather than mechanical pumping, thereby generating no particle or metal impurities.

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