Purification of ammonia

Liquid purification or separation – Processes – Ion exchange or selective sorption

Reexamination Certificate

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C210S669000, C210S681000, C210S683000, C210S684000, C210S685000, C210S687000, C210S688000

Reexamination Certificate

active

06969466

ABSTRACT:
Highly pure aqueous solution of ammonia, typically electronics grade for use in semiconductor manufacturing is prepared by passing a solution of ammonia through at least one cation exchange resin bed to remove substantially all of the cation contaminants; subsequently passing the cation exchange resin effluent through at least one anion exchange resin; and recovering an aqueous solution of ammonia product substantially free of ionic contaminants.

REFERENCES:
patent: 2184943 (1939-12-01), Pattock et al.
patent: 4263145 (1981-04-01), Wirth, Jr.
patent: 5242468 (1993-09-01), Clark et al.
patent: 5496778 (1996-03-01), Hoffman et al.
patent: 5746993 (1998-05-01), Mullee
patent: 6001223 (1999-12-01), Hoffman et al.
patent: 6183720 (2001-02-01), Laederich et al.

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