Purging light beam paths in optical equipment

Details Purging light beam paths in optical equipment Purging light beam paths in optical equipment

2006-03-21

2006-03-21

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By polarized light examination

C356S365000, C356S437000, C356S439000, C356S440000

Reexamination Certificate

active

07016039

ABSTRACT:
Purging of a light beam path in an effective manner that minimizes the affect of the purging requirement on system throughput. In one embodiment, the invention is incorporated into a birefringence measurement system that has several components for directing light through a sample optical element and thereafter detecting and analyzing the light. The segment of the beam path through the sample is isolated to reduce the volume that requires continual purging.

REFERENCES:
patent: 3895873 (1975-07-01), Dennison et al.
patent: 3958882 (1976-05-01), Gast
patent: 3977786 (1976-08-01), Gast
patent: 4413911 (1983-11-01), Rice et al.
patent: 4589775 (1986-05-01), Milhous et al.
patent: 5499095 (1996-03-01), Gast et al.
patent: 5771260 (1998-06-01), Elliott et al.
patent: 6268914 (2001-07-01), Wang
patent: 6456361 (2002-09-01), Suzuki et al.
patent: 2002/0192579 (2002-12-01), Kamono
patent: 2003/0011893 (2003-01-01), Shiraishi et al.
patent: 2004/0075834 (2004-04-01), Kaplan et al.
patent: 2004/0090628 (2004-05-01), Ershov et al.
Ware, P. Progress Report: 15-nm Lithography Prepares to Graduate, SPIE's oe magazine, Feb. 2003, pp. 14-16.
Mattison D. W., Diode-Laser Sensors for Pulse Detonation Engine Applications, AIAA, Jan. 2002, 5 pages 1-5.

Affiliated with

Also associated with

Rating

Purging light beam paths in optical equipment does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Purging light beam paths in optical equipment, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Purging light beam paths in optical equipment will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3541915