Purgeable manifold system

Fluent material handling – with receiver or receiver coacting mea – Diverse fluid containing pressure filling systems involving... – Gas treatment

Reexamination Certificate

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Details

C141S047000, C141S302000, C137S606000

Reexamination Certificate

active

10890550

ABSTRACT:
A purgeable manifold system for the movement of low vapor pressure chemicals that may be embodied in a variety of forms. In one embodiment, a container for storing the low vapor pressure chemical has a plurality of ports; a first manifold detachably connects a first port to a source of gas, vent, or vacuum by flow communication through a first diaphragm valve; a second manifold detachably connects a second port to a source of gas, vent, vacuum, or low vapor pressure chemical, or to a process tool by flow communication through a second and a third diaphragm valve, or alternatively detachably connects a third port to the same source by flow communication through a fourth and the third diaphragm valve; and a third manifold, detachably connects a fourth port to a source of gas, vent, or vacuum by flow communication through a fifth diaphragm valve.

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patent: 2006/0027281 (2006-02-01), Silva
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patent: 2004-063833 (2004-02-01), None

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