Fluent material handling – with receiver or receiver coacting mea – Diverse fluid containing pressure filling systems involving... – Gas treatment
Reexamination Certificate
2007-04-03
2007-04-03
Walczak, David J. (Department: 3751)
Fluent material handling, with receiver or receiver coacting mea
Diverse fluid containing pressure filling systems involving...
Gas treatment
C141S047000, C141S302000, C137S606000
Reexamination Certificate
active
10890550
ABSTRACT:
A purgeable manifold system for the movement of low vapor pressure chemicals that may be embodied in a variety of forms. In one embodiment, a container for storing the low vapor pressure chemical has a plurality of ports; a first manifold detachably connects a first port to a source of gas, vent, or vacuum by flow communication through a first diaphragm valve; a second manifold detachably connects a second port to a source of gas, vent, vacuum, or low vapor pressure chemical, or to a process tool by flow communication through a second and a third diaphragm valve, or alternatively detachably connects a third port to the same source by flow communication through a fourth and the third diaphragm valve; and a third manifold, detachably connects a fourth port to a source of gas, vent, or vacuum by flow communication through a fifth diaphragm valve.
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deVore Peter
Serafini Franco A.
Serafini Associates
Walczak David J.
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