Purge tube with floating end cap for loading silicon wafers into

Details Purge tube with floating end cap for loading silicon wafers into Purge tube with floating end cap for loading silicon wafers into

1989-06-20

1990-12-11

Yuen, Henry C.

Heating

Work feeding, agitating, discharging or conveying...

432258, 432259, 432253, 414147, F27D 300

Patent

active

049766120

ABSTRACT:
A purge tube for protecting a boat(s) of wafers. This purge tube does not enter the furnace. A floating end cap within the tube moves to substantially seal the furance opening during processing. The floating end cap is withdrawn back to the closed end of the tube when the wafer boat(s) is withdrawn into the tube.

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