Heating – Processes of heating or heater operation – Treating an article – container – batch or body as a unit
Patent
1989-05-22
1990-12-11
Joyce, Harold
Heating
Processes of heating or heater operation
Treating an article, container, batch or body as a unit
432152, 432253, F27D 300
Patent
active
049766104
ABSTRACT:
A movable cantilevered purge system providing for a wafer load position, a wafer purge position, and a wafer process position. The movable cantilevered purge system includes an elephant carrier vehicle for movement of a movable quartz elephant tube. The movable quartz elephant tube includes a purge injector and a return exhaust tube. A cantilevered paddle clamping vehicle moves behind the movable quartz elephant carrier vehicle and holds a silicon carbide or ceramic paddle. The elephant carrier vehicle includes a quartz sealing ring and a stainless steel sealing ring carried on pivotable adjusting blocks, and are supported by a plurality of cylindrical tubes. The quartz sealing ring concentrically positions about the process tube of the furnace and a metal ring positions about a scavenger face. The return exhaust tube connects back into the scavenger area of the furnace. An alternative embodiment illustrates a configured bellows closure door at one end of a moveable stainless steel or quartz elephant tube which seals against a process tube of a wafer processing furnace and a configured bellow doors about one end of the cantilevered paddle for providing a pressure tight or vacuum tight environment for chemical vapor deposition (CVD) processes.
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patent: 4439146 (1984-03-01), Sugita
patent: 4459104 (1984-07-01), Wollmann
patent: 4518349 (1985-05-01), Tressler et al.
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patent: 4669938 (1987-06-01), Hayward
patent: 4767251 (1988-08-01), Whang
CRYCO Twenty-Two, Inc.
Jaeger Hugh D.
Joyce Harold
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