Pupil modulation optical system

Details Pupil modulation optical system Pupil modulation optical system

1993-11-09

1996-01-02

Phan, James

Optical: systems and elements

Light control by opaque element or medium movable in or...

359385, 359885, G02B 2602, G02B 522

Patent

active

054813930

ABSTRACT:
A pupil modulation optical system which enables pupil modulation modes to be readily changed over from one to another and makes it possible to readily form an image of high resolution and high contrast. The optical system has a condenser lens (1) and an objective lens (2). Intensity modulation filters (3) and (4) for pupil modulation are disposed at at least two different pupil positions or positions equivalent to pupils of the optical system. By controlling the intensity distributions of the filters (3) and (4), various pupil modulation effects, e.g., contrast increasing effect, resolution improving effect, are obtained.

REFERENCES:
patent: 4832446 (1989-05-01), Miyagawa

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