Optics: measuring and testing – Lamp beam direction or pattern
Patent
1997-03-26
1999-10-26
Font, Frank G.
Optics: measuring and testing
Lamp beam direction or pattern
356400, 356401, 250205, G01J 100, G01J 132, G01R 1100
Patent
active
059737719
ABSTRACT:
The invention relates to the evaluation of the pupil illumination profile in a projection lithography system using an imaging reticle featuring a plurality of holes of few microns in diameter. The imaging reticle is placed at the lens object plane and a photoresist coated substrate is exposed in a defocused position from the lithographic image plane. The image reticle has a plurality of identical holes that are regularly spaced at predetermined distances for a more detailed evaluation of the effective pupil illumination across the entire exposure field.
REFERENCES:
patent: 4000949 (1977-01-01), Watkins
patent: 5300967 (1994-04-01), Kamon
patent: 5420417 (1995-05-01), Shiraishi
patent: 5461456 (1995-10-01), Michalosk
Hibbs Michael Straight
Humphrey Dean Craig
Pealer, III Grant Neven
Peck Barbara Bates
Chadurjian Mark F.
Font Frank G.
International Business Machines - Corporation
Punnoose Roy M.
LandOfFree
Pupil imaging reticle for photo steppers does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Pupil imaging reticle for photo steppers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pupil imaging reticle for photo steppers will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-770490