Pumping system for evacuating reactor chambers

Details Pumping system for evacuating reactor chambers Pumping system for evacuating reactor chambers

1994-09-06

1995-07-18

Rivell, John

Fluid handling

Processes

Involving pressure control

137566, 137606, 137861, 141 8, 141 65, B65B 3104

Patent

active

054332389

ABSTRACT:
A system for evacuating a reactor chamber includes a main evacuation line connected at one end thereof to the reactor chamber and at another end thereof to a means for creating a partial vacuum. A valve in the main evacuation line divides the line into a chamber side and a vacuum side. A second line is connected at one end to the vacuum side of the main evacuation line and at another end to a fluid supply source. As the valve in the main evacuation line is opened, fluid is supplied through the second line to the main evacuation line to prevent rapid, turbulence-inducing pressure drops in the reactor chamber.

REFERENCES:
patent: 2757840 (1956-08-01), Weissenberg et al.
patent: 4172477 (1979-10-01), Reich
patent: 4181161 (1980-01-01), Kraus
patent: 5031674 (1991-07-01), Mack
patent: 5244019 (1993-09-01), Derby

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