Pumping system for a leak detecting device

Details Pumping system for a leak detecting device Pumping system for a leak detecting device

1989-06-01

1990-04-24

Smith, Leonard E.

Pumps

Motor driven

Electric or magnetic motor

73 407, 415 90, F04D 1904, G01M 320

Patent

active

049195999

ABSTRACT:
Leak detecting device working on the counter current principle uses a test piece connected to the inlet of a first turbomolecular pump, a gas detector connected to the inlet of a second turbomolecular pump. First and second molecular pumps downstream of the respective turbomolecular pumps have a common outlet connected to a pre-vacuum pump and reduce the effect of test gas substratum. Both turbomolecular and other molecular pumps are on a common shaft, the passages between each turbomolecular and molecular pumping stage being connected.

REFERENCES:
patent: 3690151 (1972-09-01), Briggs
patent: 4365158 (1982-12-01), Tallon
patent: 4472962 (1984-09-01), Mennenga
patent: 4550593 (1985-11-01), Reich
patent: 4773256 (1988-09-01), Saulgeot
patent: 4779449 (1988-10-01), Bley et al.
patent: 4785666 (1988-10-01), Berquist

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