Pumping state turbomolecular pumps

Details Pumping state turbomolecular pumps Pumping state turbomolecular pumps

1993-10-21

1995-02-07

Kwon, John T.

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

F01D 136

Patent

active

053870794

ABSTRACT:
The present invention refers to a pumping stage for turbomolecular pumps comprising a rotor disk (3), integral with a rotating shaft (4) operated by a motor, and a stator disk (1) said stator disk (1), integral with the pump body (2), where the stator disk (1) is a disk whose surface is substantially smooth that can assume, during the evacuation cycle, a bladed configuration, by raising radial sections (5) of the disk surface itself. Raising of radial sections (5) is performed by at least one actuator device (11) controlled, through an electronic control device (12), by a pressure sensor (13) sampling the pressure inside the pump body (2).

REFERENCES:
patent: 3291236 (1966-12-01), Foshag et al.
patent: 3820916 (1974-06-01), Agushev et al.
patent: 4531372 (1985-07-01), Slabaugh
patent: 4768921 (1988-09-01), Shinjiro et al.
patent: 5158426 (1992-10-01), Casaro et al.

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