Pumping apparatus using thermal transpiration micropumps

Details Pumping apparatus using thermal transpiration micropumps Pumping apparatus using thermal transpiration micropumps

2004-11-03

2009-08-11

Kramer, Devon C (Department: 3746)

Pumps

Successive stages

C417S207000, C417S208000, C417S410100, C219S209000, C219S210000

Reexamination Certificate

active

07572110

ABSTRACT:
Pumping apparatus of the invention using thermal transpiration micropumps comprises a plurality of individual thermal transpiration micropumps distributed over a substrate (5) as a plurality of rows (A, B, C, . . . , D) each made up of a plurality of micropumps (1, 6, . . . , 7, 8, 9), thereby building up a plurality of columns (a, b, . . . , c, d). Respective heater elements (4) in each of the thermal transpiration micropumps are controlled by suitably controlling a row control conductor (10A) and a column control conductor (11a). This greatly simplifies multiplexed control of a large number of individual micropumps, thus enabling pumping capacity to be adapted.

REFERENCES:
patent: 5041800 (1991-08-01), Long et al.
patent: 5541629 (1996-07-01), Saunders et al.
patent: 5871336 (1999-02-01), Young
patent: 6422823 (2002-07-01), Bernard et al.
patent: 6533554 (2003-03-01), Vargo et al.
patent: 2002/0076140 (2002-06-01), Kobrin
patent: 2004/0151598 (2004-08-01), Young et al.

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