Pump stage for a high-vacuum pump

Details Pump stage for a high-vacuum pump Pump stage for a high-vacuum pump

1989-10-10

1990-12-18

Look, Edward K.

Rotary kinetic fluid motors or pumps

With means for re-entry of working fluid to blade set

Turbine regenerative pump

415 73, 415 76, F04D 2900, F04D 1904

Patent

active

049782762

ABSTRACT:
A high-vacuum pump includes a plurality of pump stages, each of which has a rotor and a stator. In one of the pump stages, either the rotor or the stator is provided with a structure that effects the gas conveying includes radially extending webs whose pitch and width decrease from the suction side of the pump stage to the thrust side of the pump stage.

REFERENCES:
patent: 109926 (1870-12-01), Monroe
patent: 2941780 (1960-06-01), Nuell et al.
patent: 3697190 (1972-10-01), Haentjens
patent: 4332522 (1982-06-01), Saulgeot

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