Liquid purification or separation – Filter – With pump – gas pressure – or suction source
Patent
1984-12-17
1986-10-21
Chiesa, Richard L.
Liquid purification or separation
Filter
With pump, gas pressure, or suction source
210167, 210196, 210805, 417473, B01D 2942
Patent
active
046184252
DESCRIPTION:
BRIEF SUMMARY
DESCRIPTION
This invention is concerned with pumping corrosive fluids, such as acids used in etching or other production processes.
Apparatus which is used to etch microelectronic components during their manufacture includes open topped acid baths which are divided into primary and secondary compartments. The etching process takes place in the primary compartment. Resultant waste products surface and float on the acid in the primary compartment and are carried into the secondary compartment by some of the acid which flows over a weir which is formed by a barrier which separates the two compartments. A hood is provided above the bath to collect the acid fumes. The acid in the secondary compartment is pumped through a filter and the filtered acid is returned to the primary compartment.
If the pump, by which acid in the secondary compartment is pumped out of the secondary compartment through the filter, is driven by an electric motor which is supported above the level of acid in the bath, the life of the electric motor is short because of the corrosive effects of the acid fumes rising from the acid in the bath.
It is an object of this invention to minimize the corrosive effects of corrosive fluids, such as acids and/or their fumes upon operation of a pump by which the acid is pumped.
According to one aspect of this invention there is provided a pump for pumping corrosive fluids which comprises one group of parts which collectively comprise all the parts of the pump that are `wetted` by corrosive fluids during use of the pump, all the parts of said one group being formed of a material which is resistant to corrosion by corrosive fluid which the pump is designed to pump, and including corrosive fluid displacement means operable to cause flow of corrosive fluid, and another group of parts including power operable motive means operable to drive the corrosive fluid displacement means and automatically operable control gear which controls operation of said motive means, wherein the pump is a submersible pump, said one group of parts also including the complete outer casing and motive power supply means connectable to an external source of motive power, and the other group of parts being wholly encased within structure which is formed by said one group of parts and thereby being shielded from contact by corrosive fluid which is pumped by the pump. Hence materials which are not resistant to the corrosive action of corrosive fluid that the pump is designed to pump can be used to form said other group of parts.
The power operable motive means may be gas powered in operation, said motive power supply means comprising gas supply conduit means for supplying working gas from a remote source of such gas under pressure through said structure to a working fluid space of said power operable motive means, there being exhaust gas conduit means provided for exhausting working gas from a working fluid space of the power operable motive means and for conveying exhausted working gas through said structure and away to a remote location during operation of the pump.
Conveniently the pump comprises a double acting bellows pump, the bellows of which function as said corrosive fluid displacemant means. The bellows pump may comprise a pump body forming two spaced chambers, a rod which slides within a bore between the chambers, a cup shaped bellows connected by its base at either end of the rod, each bellows being arranged with its side wall projecting from its base away from the rod so that the variable volume cavities formed by the two bellows are separated by the bases of the bellows and by the rod, each bellows being secured to the pump body so as to close a respective one of the chambers in a fluid-tight manner and form a respective one of the working fluid spaces therebetween, said motive power supply means and said exhaust gas conduit means comprising passages in the pump body for conveying working gas to each working fluid space which is formed between the respective bellows and the pump body and for exhausting working fluid gas f
REFERENCES:
patent: 2383486 (1945-08-01), Isenberg et al.
patent: 2563862 (1951-08-01), Nechine
patent: 2963979 (1960-12-01), Eisenmann et al.
patent: 3182597 (1965-05-01), Malizard et al.
patent: 3283911 (1966-11-01), Reise
patent: 3578174 (1971-11-01), Karpacheva et al.
patent: 3610416 (1971-10-01), Otto
patent: 3637331 (1972-01-01), Smith et al.
patent: 3920352 (1975-11-01), Speck et al.
patent: 4277333 (1981-07-01), Coppola
Hawley, G. G.; The Condensed Chemical Dictionary; 8th Edition; Reinhold Co.; 1971; pp. 712, 713.
Chiesa Richard L.
Production Techniques Limited
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