Pulsed gas discharge Xray laser

Details Pulsed gas discharge Xray laser Pulsed gas discharge Xray laser

1994-08-03

1995-11-14

Scott, Jr., Leon

Coherent light generators

Short wavelength laser

372 62, 372 65, H01S 330

Patent

active

054673623

ABSTRACT:
A high current, pulsed, high repetition rate, electric discharge, extreme ultraviolet and Xray laser. The low inductance discharge bore is constructed from a plurality of discs (18). The bore segments are separated from one another by spacers constructed from a refractory electrical insulator (20). The components in contact with the gas discharge are constructed from high temperature materials with low sputtering rates and low rates of ion burial. Gas return holes (74) are provided in the bore segments discs. Xray reflecting mirrors form an optical cavity.

REFERENCES:
patent: 4378600 (1983-03-01), Hobart
patent: 4719638 (1988-01-01), Carlson et al.
patent: 4734915 (1988-03-01), Mefferd et al.
patent: 4736379 (1988-04-01), Barker et al.
patent: 5319662 (1994-06-01), Warner et al.
patent: 5341392 (1994-08-01), Warner et al.

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