Pulsed gas-discharge laser

Details Pulsed gas-discharge laser Pulsed gas-discharge laser

1992-03-27

1993-09-21

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

372 87, 372 5, 372 86, 372 61, H01S 322

Patent

active

052475344

ABSTRACT:
A pulsed gas-discharge laser, in particular an excimer laser, comprises main discharge electrodes (10, 10a) of erosion-resistant metal between which laser gas flows with high velocity to replace the laser gas between the main discharge electrodes from laser pulse to laser pulse. For preionizing the laser gas two X-ray radiation sources (30, 30a) are arranged adjacent one main discharge electrode (10). The flow path (18) of the laser gas is formed partially by flow bodies (16, 16a, 32, 32a) which consist of a material which has a high secondary emissive power with regard to the X-ray radiation. The secondary radiation is so configured that it promotes the preionization.

REFERENCES:
patent: 5033059 (1991-07-01), Perzl et al.
patent: 5048045 (1991-09-01), Noda et al.
patent: 5097475 (1992-03-01), Perzl et al.

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