Pulsed electron beam device comprising a cathode having through

Details Pulsed electron beam device comprising a cathode having through Pulsed electron beam device comprising a cathode having through

1981-02-12

1983-06-21

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504923, H01J 300, H01J 3300

Patent

active

043895735

ABSTRACT:
In a gas-filled space, a pulsed electron beam device comprises a cathode provided with through holes, a filament on one side of the cathode, and an anode on the other side with a sample to be processed held thereon. Electrons emitted by the filament are momentarily directed to the cathode so that a portion thereof may trigger a discharge in a space between the anode and cathode. The discharge ceases in a moment, meanwhile providing electron beams to uniformly process the sample. The cathode may comprise either a single plate of graphite or a combination of a graphite plate and an aluminum plate. Preferably, a net electrode is placed between the cathode and the anode and electrically connected to the anode.

REFERENCES:
patent: 2856532 (1958-10-01), Martina
patent: 3192892 (1965-07-01), Hanson et al.
patent: 3950187 (1976-04-01), Kirkpatrick
patent: 4321470 (1982-03-01), Kaplan et al.
patent: 4335314 (1982-06-01), Geerk et al.

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