Fluid handling – Processes – With control of flow by a condition or characteristic of a...
Reexamination Certificate
2005-07-05
2005-07-05
Krishnamurth, Ramesh (Department: 3753)
Fluid handling
Processes
With control of flow by a condition or characteristic of a...
C137S486000, C137S487500, C137S624150
Reexamination Certificate
active
06913031
ABSTRACT:
A flow controller and a flow controlling method are adapted to be released from conventional restrictions by using a novel type called a pulse shot type. A pulse shot (opening/closing operation of a first cutoff valve (12) and, after that, opening/closing operation of a second cutoff valve (17)) is repeated. Simultaneously, a volume flow Q of process gas exhausted from the second cutoff valve (17) per unit time on the basis of after-filling pressure and after-exhaust pressure of the process gas in a gas filling capacity (13) measure by a pressure sensor (14). Furthermore, a mode of the pulse shot is changed to control the volume flow Q of the process gas exhausted from the second cutoff valve (17) per unit time.
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Doi Hiroki
Kouketsu Masayuki
Nawata Tokuhide
Sudoh Yoshihisa
Watanabe Masayuki
CKD Corporation
Krishnamurth Ramesh
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