Optical: systems and elements – Single channel simultaneously to or from plural channels – By partial reflection at beam splitting or combining surface
Reexamination Certificate
2011-08-23
2011-08-23
Choi, William C (Department: 2873)
Optical: systems and elements
Single channel simultaneously to or from plural channels
By partial reflection at beam splitting or combining surface
C359S633000
Reexamination Certificate
active
08004770
ABSTRACT:
A beam modifying unit increases both temporal pulse length and Etendue of an illumination beam. The pulse modifying unit receives an input pulse of radiation and emits one or more corresponding output pulses of radiation. A beam splitter divides the incoming pulse into a first and a second pulse portion, and directs the first pulse portion along a second optical path and the second portion along a first optical path as a portion of an output beam. The second optical path includes a divergence optical element. A first and a second mirror, each with a radius of curvature, are disposed facing each other with a predetermined separation, and receive the second pulse portion to redirect the second portion, such that the optical path of the second portion through the pulse modifier is longer than that of the first portion, and the separation is less than radius of curvature.
REFERENCES:
patent: 7630424 (2009-12-01), Ershov et al.
patent: 7643529 (2010-01-01), Brown et al.
patent: 2006/0126681 (2006-06-01), Botma et al.
patent: WO 2007/053335 (2007-05-01), None
Search Report and Examination mailed May 27, 2010 for European Application No. 09175033.1-1226, 8 pgs.
English translation of Korean Notification of Reasons for Refusal directed to related Korean Application No. 10-2009-0134501, Korean Intellectual Property Office, dated May 1, 2011; 6 pages.
Joobeur Adel
Noordman Oscar Franciscus Jozephus
Van Der Veen Paul
Venkataraman Arun Mahadevan
ASML Holding N.V.
ASML Netherlands B.V.
Choi William C
Sterne, Kessler, Goldstein & Fox P.L.L.C
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