Coherent light generators – Particular beam control device – Control of pulse characteristics
Patent
1997-07-21
1998-12-22
Lee, John D.
Coherent light generators
Particular beam control device
Control of pulse characteristics
356218, 372 30, H01S 310
Patent
active
058526218
ABSTRACT:
A pulse laser system for providing precise control of laser pulse energy. A fast pulse energy detector having response time in the nanosecond or sub-nanosecond range provides an electrical signal representing pulse energy to a trigger circuit, which integrates the signal and triggers an electro-optic switch when the integrated signal reaches a predetermined level. The operation of the electro-optic switch trims a portion of the pulse energy so that the resulting pulse energy is maintained at a consistent and desired level. In a preferred embodiment, the electro-optic switch includes a Pockels cell and at least one polarizing beam splitter. In this preferred embodiment, an optical delay line provides additional time for the pulse trimming components to operate.
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patent: 5742634 (1998-04-01), Rieger et al.
Zucker, O.S.F., McIntyre, I.A., Solone, P.J. and Hargis, D.E., "Photoconductively controlled electro-optic laser modulation", Optics Letters, vol. 18, No. 15, Aug. 1, 1993, pp. 1271-1273.
Zucker, O.S.F., McIntyre, I., Solone, P., Cardwell, K. and Hargis, D., "Photoconductive switch control of optical devices", SPIE, vol. 1873
Cymer Inc.
Lee John D.
Ross, Esq. John R.
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