Pipes and tubular conduits – With pressure compensators – Variable capacity chambers
Patent
1999-03-10
2000-08-01
Brinson, Patrick
Pipes and tubular conduits
With pressure compensators
Variable capacity chambers
138 26, 73239, F16L 5504
Patent
active
06095194&
ABSTRACT:
The present invention relates to a pulsation suppression device which is interposingly used in a liquid transporting pipe through which a chemical liquid such as a surface washing liquid for washing an IC is transported by a reciprocal pump. The pulsation suppression device of the present invention has: a bellows which partitions the interior of the device body having a sealed container-like shape, into a liquid chamber and an gas chamber; an operating rod which is reciprocated in interlock relationship with the bellows; and an extension and contraction restricting mechanism which, when the bellows extends to a predetermined value, is contacted in parallel with a closed end face of the bellows, thereby restricting further extension of the bellows. Furthermore, the pulsation suppression device of the present invention has a guide for making the reciprocal operation of the operating rod coincident with the extension and contraction directions of the bellows. The guide is made of a low-friction resin material. According to the present invention, pulsation due to the discharge pressure of the transported liquid is absorbed and the amplitude of pulsation is suppressed to a low level. Moreover, the bellows used in the pulsation suppression device is prevented from being damaged, and the pulsation suppression function can be stabilized.
REFERENCES:
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Fujii Makoto
Katsura Masayoshi
Minato Yoji
Brinson Patrick
Nippon Pillar Packaging Co., Ltd.
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