Stock material or miscellaneous articles – Composite – Of quartz or glass
Patent
1993-10-14
1996-04-30
Robinson, Ellis P.
Stock material or miscellaneous articles
Composite
Of quartz or glass
428428, 428432, 428697, 428699, 428700, 428702, 117 90, 117 95, 117101, 117106, B32B 1706, C30B 2940
Patent
active
055123759
ABSTRACT:
High quality epitaxial layers can be grown on a multi-layer substrate which has a crystalline pseudomorphic layer with an exposed surface used for the epitaxial growth. The pseudomorphic layer of the substrate has a thickness at or below the pseudomorphic limit so it will be deformed as stress forces are developed during epitaxial growth of heteroepitaxial structures. A plastically deformable layer is bonded to the pseudomorphic layer, This plastically deformable layer is made of material that plastically flows at epitaxial growth temperatures.
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Aebi Verle W.
Davis Gary A.
Green Roger T.
Cole Stanley Z.
Intevac, Inc.
Jones III Leonidas J.
Lowe Allan M.
Robinson Ellis P.
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