Measuring and testing – With fluid pressure – Dimension – shape – or size
Reexamination Certificate
2006-03-28
2006-03-28
Williams, Hezron (Department: 2856)
Measuring and testing
With fluid pressure
Dimension, shape, or size
Reexamination Certificate
active
07017390
ABSTRACT:
The present invention is directed to an apparatus for reducing the impact of cross winds on gas flow emitted from a nozzle. The apparatus includes a shroud that affixes to the nozzle. A plenum is located inside the shroud that holds a shroud gas, which is fed into the plenum through one or more intake holes. The shroud gas is emitted out through a series of openings, such as holes or slots, along a bottom surface of the shroud in a direction away from the nozzle. The shroud gas that is emitted forms an air curtain around the nozzle to prevent cross winds from impacting the flow of gas out of the nozzle. In one application, the apparatus is used with a lithography gas gauge proximity sensor. The apparatus can also be used with nozzles that emit liquids, such as, for example, an immersion lithography proximity sensor.
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ASML Holding N.V.
Fitzgerald John
Sterne Kessler Goldstein & Fox P.L.L.C.
Williams Hezron
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