Proximity mask alignment using a stored video image

Facsimile and static presentation processing – Static presentation processing – Attribute control

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Details

358106, 358107, 358101, 358227, H04N 718

Patent

active

052047393

ABSTRACT:
A proximity mask alignment system includes a remotely-focusing microscope and a video frame storage device. When a first surface, such as an integrated circuit substrate, is in focus an image of the first surface is obtained and stored. Then, after the microscope is re-focused to a second surface, such as a photomask, the stored image of the first surface is superimposed onto the "live" image of the second surface. The two focal positions are stored, with a selected one being normally provided to the microscope. A user initiates an automatic sequence wherein the microscope focuses to the other focal position, stores an image obtained at the other focal position, then refocuses to the original focal position. The stored image is superimposed on the image currently being generated, enabling the user to simultaneous view each surface in sharp focus, facilitating the alignment of the two surfaces to one another.

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patent: 4282548 (1981-08-01), Plummer
patent: 4829374 (1989-05-01), Miyamoto
patent: 4851903 (1989-07-01), Ikeda
patent: 4929893 (1990-05-01), Sato
patent: 4938600 (1990-07-01), Into

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