Providing of gases for an excimer laser

Details Providing of gases for an excimer laser Providing of gases for an excimer laser

1985-05-31

1987-06-16

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

372 57, 372 60, H01S 322

Patent

active

046740988

ABSTRACT:
A method of reducing an expenditure of a rare gas in an excimer laser system includes evacuating a lasing material including a mixture of diluent rare gas and removing therefrom halogen compounds. Supplemental lasing material is then added to the lasing mixture.

REFERENCES:
patent: 4259645 (1981-03-01), Sze et al.
patent: 4259646 (1981-03-01), Sze et al.
patent: 4301425 (1981-11-01), Sze

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