Providing a dynamic sampling plan for integrated metrology

Details Providing a dynamic sampling plan for integrated metrology Providing a dynamic sampling plan for integrated metrology

2008-03-18

2009-08-18

Raymond, Edward (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C382S149000

Reexamination Certificate

active

07577537

ABSTRACT:
A computer program product and system of providing a dynamic sampling plan for integrated metrology is disclosed. The computer program product may include a computer readable medium that includes a computer readable program, wherein the computer readable program when executed on a computer causes the computer to: model a sampling plan for use with a factory level advanced processing control (FL-APC) system; receive a request for a sampling plan; and send a recommended sampling plan, based upon the request and the modeling. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.

REFERENCES:
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patent: 6687561 (2004-02-01), Pasadyn et al.
patent: 6821792 (2004-11-01), Sonderman et al.
patent: 6920405 (2005-07-01), Lawrence
patent: 2006/0184264 (2006-08-01), Willis et al.

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