Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate
2006-06-05
2011-11-29
Nguyen, Thanh (Department: 2893)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
C438S051000, C438S055000, C438S064000, C438S068000, C257SE21001
Reexamination Certificate
active
08067258
ABSTRACT:
A method of protecting a substrate during fabrication of semiconductor, MEMS, or biotechnology devices. The method includes application of a protective thin film which typically has a thickness ranging from about 3 Å to about 1,000 Å, wherein precursor materials used to deposit the protective thin film are organic-based precursors which include at least one fluorine-comprising functional group at one end of a carbon back bone and at least one functional bonding group at the opposite end of a carbon backbone, and wherein the carbon backbone ranges in length from 4 carbons through about 12 carbons. In many applications at least a portion of the protective thin film is removed during fabrication of the devices.
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Chinn Jeffrey D.
Kobrin Boris
Nowak Romuald
Applied Microstructures, Inc.
Martine Penilla Group LLP
Nguyen Thanh
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