Protective overlayer material and electro-optical coating using

Details Protective overlayer material and electro-optical coating using Protective overlayer material and electro-optical coating using

1995-05-31

1996-06-25

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359245, G02F 115, G02F 103

Patent

active

055305814

ABSTRACT:
An electro-optical device comprising a series of thin films with an electrically controllable optical state provided with a protective overlayer that has a high optical transmittance and high resistance to penetration by H.sub.2 O. The protective overlayer is a film of amorphous silicon oxycarbide (a-SiOC:H) having an O to C ratio such that the optical absorption edge of the a-SiOC:H is 3 eV or greater and the H.sub.2 O transport through a 500 nm thick film of a-SiOC:H is 10.sup.12 molecules/cm.sup.2 -s or less.

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Chang et al., "Novel Passivation Dielectrics--The boron--or Phosphorous--Doped Hydrogenated Amorphous Silicon Carbide Films," J. Electrochem. Soc., 132, 418-422 (1985).

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