Coating processes – Optical element produced – Transparent base
Patent
1997-09-29
2000-12-19
Meeks, Timothy
Coating processes
Optical element produced
Transparent base
427250, 42725515, 4272557, 427294, 20419211, 20419226, 20419227, 359572, 359576, C23C 1424
Patent
active
061624950
ABSTRACT:
An overcoat protected diffraction grating. A replica grating having a thin aluminum reflective grating surface is produced by replication of a master grating or a submaster grating. The thin aluminum reflective surface may be cracked or have relatively thick grain boundaries containing oxides and hydroxides of aluminum and typically is also naturally coated with an aluminum oxide film. The grating is subsequently recoated in a vacuum chamber with a thin, pure, dense aluminum overcoat and then also in the vacuum the aluminum overcoat is coated with a thin film of MgF.sub.2. The grating is especially suited for use for wavelength selection in an ArF laser operating producing an ultraviolet laser beam at a wavelength of about 193 nm. The oxygen free aluminum overcoat prevents the ultraviolet light from causing damage by stimulating chemical reactions in grating materials under the aluminum grating surface or in the aluminum oxide film. The MgF.sub.2 additionally prevents oxidation on the surface of the aluminum overcoat.
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Cymer Inc.
Meeks Timothy
Ross, Esq. John R.
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