Protective layer for electroactive passivation layers

Details Protective layer for electroactive passivation layers Protective layer for electroactive passivation layers

1990-02-01

1992-11-10

James, Andrew J.

Active solid-state devices (e.g., transistors, solid-state diode

With means to control surface effects

Insulating coating

430 67, 257 63, H01L 4500

Patent

active

051628759

ABSTRACT:
Hard, mechanically and chemically stable protective layers for electroactive passivation layers of semiconductor components, which also act as diffusion barriers against moisture and ions, comprise a thin layer of amorphous, hydrogenated carbon.

REFERENCES:
patent: 4254426 (1981-03-01), Pankove
patent: 4322452 (1982-03-01), Krausse et al.
patent: 4330182 (1982-05-01), Coleman
patent: 4675265 (1987-06-01), Kazama et al.
patent: 5000831 (1991-03-01), Osawa et al.
patent: 5039358 (1991-08-01), Birkle et al.
IDR-Industrie Diamanten Rundschau, vol. 18 (1984), No. 4, pp. 249-253, "Eigenschaften und Anwendungen harter amorpher Kohlenstoffschichten".

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