Protective film transfer sheet for photo masks and a method...

Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Adhesive outermost layer

Reexamination Certificate

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Details

C428S354000, C428S352000, C428S3550AC

Reexamination Certificate

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07087297

ABSTRACT:
A protective film transfer sheet comprises a peelable support and a protective film formed on the support, wherein the protective film comprises a protective layer and an adhesive layer formed on the support in this order and the adhesive layer has pressure-sensitive adhesiveness, the adhesiveness of the adhesive layer being increased upon heating after transferred on the image surface of photo masks, and is curable by exposure to ionizing radiation. The protective film formed by the protective film transfer sheet is excellent in adhesiveness to the image surface of photo masks, mar resistance and resistance to solvents.

REFERENCES:
patent: 5051295 (1991-09-01), Mori et al.
patent: 63-132097 (1988-06-01), None
patent: 6-20601 (1994-06-01), None
Definition of “Prepolymer”, Concise Encyclopedia of Polymer Science and Engineering; J. Kroschwitz; John Wiley & Sons; 1990; p. 902.
Transaltion of JP 63-132097 by FLS, Inc., see IDS dated Feb. 3, 2004 for date and additional information.

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