Protective cover

Details Protective cover Protective cover

1985-10-18

1987-01-06

Wintercorn, Richard A.

Photocopying

Contact printing

Frames

355 30, 355 53, 355 75, G03B 2728, G03B 2752

Patent

active

046342702

ABSTRACT:
A protective cover for photoprinting system comprises a cover portion made of a transparent thin plate of inorganic material, an antireflection multiple coating provided on at least one of the inner and outer surfaces of the cover plate, and a spacer arranged on the peripheral portion of the cover plate for keeping the inner surface of the cover plate away from the surface to be protected, e.g., pattern surface of photomask and sealing the space between them.
Since the cover plate is made of inorganic material, the mechanical strength thereof is large. Since the cover plate is thin and the antireflection multiple coating is provided on the cover plate, absorption of light therein is little and confusion of the pattern image due to rays reflected by the boundaries of the cover plate is ignorable.

REFERENCES:
patent: 4063812 (1977-12-01), Abraham et al.
patent: 4131363 (1978-12-01), Shea et al.
patent: 4402600 (1963-09-01), Araihara

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