Patent
1987-03-02
1990-11-20
Hille, Rolf
357 52, 357 2, 357 67, H01L 2194, H01L 21469, H01L 21441
Patent
active
049722506
ABSTRACT:
A protective coating useful as a passivation layer for semiconductor devices incorporates a thin film of an amorphous diamond-like carbon. In one implementation, a thin film of amorphous silicon is deposited over the carbon material. The semiconductive passivation coating eliminates electrical shorts, dissipates charge build-up and protects against chemical contamination.
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Omori Masahiro
Stoneham Edward B.
Clark S. V.
Hille Rolf
Microwave Technology, Inc.
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