Protective coating for IV-VI compound semiconductor devices

Details Protective coating for IV-VI compound semiconductor devices Protective coating for IV-VI compound semiconductor devices

1975-04-23

1976-07-13

Heyman, John S.

357 15, 357 30, 357 52, 357 72, 357 73, 357 61, H01L 2912

Patent

active

039697436

ABSTRACT:
Devices fabricated from certain compound semiconductors of the group IV-VI series are provided with optically transparent coatings of barium fluoride, calcium fluoride, or strontium fluoride. These coating materials are insulators, chemically and electrically inert to the semiconductors, easily applied, and mechanically compatible thus making excellent protective coatings. In addition the coatings can act as diffusion masks in device fabrication thus enhancing planar device processing.

REFERENCES:
patent: 3663279 (1972-05-01), Lepselter
patent: 3671820 (1972-06-01), Haering et al.
patent: 3779801 (1973-12-01), Halloway et al.
patent: 3796930 (1974-03-01), Page

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