Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2006-03-28
2006-03-28
Rachuba, M. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S041000, C451S289000, C451S388000
Reexamination Certificate
active
07018268
ABSTRACT:
The present invention provides an apparatus and method for protecting a work piece during surface processing. The apparatus employs a protective material to protect a wafer during backside grinding. The apparatus can further include a vacuum chuck that allows the passage of a vacuum signal, a frame holding the protective material, a frame holder to hold the frame, and a fastening arrangement to fasten the frame holder to the chuck adjacent a support surface. The method provided by the invention can include providing a vacuum chuck, placing a protective material in contact with the chuck, placing a wafer in contact with the protective material, applying a vacuum signal securing the wafer with the chuck, and grinding the backside surface of the wafer.
REFERENCES:
patent: 2102597 (1937-12-01), Mable
patent: 3930914 (1976-01-01), Hetrich
patent: 3962832 (1976-06-01), Strasbaugh
patent: 3986433 (1976-10-01), Walsh et al.
patent: 4009540 (1977-03-01), Uijen
patent: 4165584 (1979-08-01), Scherrer
patent: 4317301 (1982-03-01), Timphony et al.
patent: 4380412 (1983-04-01), Walsh
patent: 4441791 (1984-04-01), Hornbeck
patent: 4493606 (1985-01-01), Foulke et al.
patent: 4521995 (1985-06-01), Sekiya
patent: 4583325 (1986-04-01), Tabuchi
patent: 4597228 (1986-07-01), Koyama et al.
patent: 4607182 (1986-08-01), Ballhaus
patent: 4615762 (1986-10-01), Jastrzebski et al.
patent: 4625463 (1986-12-01), Sekiya
patent: 4637369 (1987-01-01), Petermann et al.
patent: 4662746 (1987-05-01), Hornbeck
patent: 4667944 (1987-05-01), Althouse
patent: 4710732 (1987-12-01), Hornbeck
patent: 4850472 (1989-07-01), Liebel et al.
patent: 4861462 (1989-08-01), Lehmann et al.
patent: 4881518 (1989-11-01), Feldmeier
patent: 4896459 (1990-01-01), Brandt
patent: 4946716 (1990-08-01), Corrie
patent: 4956619 (1990-09-01), Hornbeck
patent: 4967461 (1990-11-01), Feldmeier
patent: 4967725 (1990-11-01), Hinzen
patent: 5026178 (1991-06-01), Ballhaus
patent: 5061049 (1991-10-01), Hornbeck
patent: 5083857 (1992-01-01), Hornbeck
patent: 5105147 (1992-04-01), Karasikov et al.
patent: 5161332 (1992-11-01), Koch
patent: 5285597 (1994-02-01), Hinzen
patent: 5345170 (1994-09-01), Schwindt et al.
patent: 5424224 (1995-06-01), Allen et al.
patent: 5445559 (1995-08-01), Gale et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5584746 (1996-12-01), Tanaka et al.
patent: 5605489 (1997-02-01), Gale et al.
patent: 5632667 (1997-05-01), Earl et al.
patent: 5698474 (1997-12-01), Hurley
patent: 5731243 (1998-03-01), Peng et al.
patent: 5783835 (1998-07-01), Hollman et al.
patent: 5786236 (1998-07-01), Thompson et al.
patent: 5795990 (1998-08-01), Gitis et al.
patent: 5799994 (1998-09-01), Tsai et al.
patent: 5883522 (1999-03-01), O'Boyle
patent: 5888883 (1999-03-01), Sasaki et al.
patent: 5938512 (1999-08-01), Takei et al.
patent: 5959461 (1999-09-01), Brown et al.
patent: 5961169 (1999-10-01), Kalenian et al.
patent: 5964646 (1999-10-01), Kassir et al.
patent: 5964952 (1999-10-01), Kunze-Concewitz
patent: 6017822 (2000-01-01), Mountain
patent: 6022807 (2000-02-01), Lindser, Jr. et al.
patent: 6036587 (2000-03-01), Tolles et al.
patent: 6043458 (2000-03-01), Fortune
patent: 6045716 (2000-04-01), Walsh et al.
patent: 6050880 (2000-04-01), Kato et al.
patent: 6056632 (2000-05-01), Mitchel et al.
patent: 6072157 (2000-06-01), Klebanoff et al.
patent: 6083090 (2000-07-01), Bamba
patent: 6083811 (2000-07-01), Riding et al.
patent: 6102057 (2000-08-01), Vogtmann et al.
patent: 6107107 (2000-08-01), Bruce et al.
patent: 6120360 (2000-09-01), Ball et al.
patent: 6131589 (2000-10-01), Vogtmann et al.
patent: 6139953 (2000-10-01), Nagamoto et al.
patent: 6146242 (2000-11-01), Treur et al.
patent: 6171163 (2001-01-01), Seko et al.
patent: 6183341 (2001-02-01), Melcer
patent: 6193586 (2001-02-01), Park et al.
patent: 6225235 (2001-05-01), Kunze-Concewitz
patent: 6227956 (2001-05-01), Halley
patent: 6245587 (2001-06-01), Vallett
patent: 6251551 (2001-06-01), Kunze-Concewitz
patent: 6251705 (2001-06-01), Degani et al.
patent: 6254155 (2001-07-01), Kassir
patent: 6255741 (2001-07-01), Yoshihara et al.
patent: 6257953 (2001-07-01), Gitis et al.
patent: 6273794 (2001-08-01), Tietz et al.
patent: 6273804 (2001-08-01), Numoto
patent: 6281025 (2001-08-01), Ring et al.
patent: 6294395 (2001-09-01), Birdsley et al.
patent: 6297131 (2001-10-01), Yamada et al.
patent: 6303396 (2001-10-01), Ring et al.
patent: 6303399 (2001-10-01), Engelmann et al.
patent: 6303469 (2001-10-01), Larson et al.
patent: 6320269 (2001-11-01), Chen et al.
patent: 6321739 (2001-11-01), Roberts
patent: 6324918 (2001-12-01), Gitis et al.
patent: 6335628 (2002-01-01), Schwindt et al.
patent: 6336849 (2002-01-01), Konnemann
patent: 6344402 (2002-02-01), Sekiya
patent: 6346036 (2002-02-01), Halley
patent: 6358129 (2002-03-01), Dow
patent: 6361647 (2002-03-01), Halley
patent: 6363798 (2002-04-01), Gitis et al.
patent: 6371840 (2002-04-01), Ball et al.
patent: 6379235 (2002-04-01), Halley
patent: 6380751 (2002-04-01), Harwood et al.
patent: 6398892 (2002-06-01), Noguchi et al.
patent: 6418776 (2002-07-01), Gitis et al.
patent: 6450860 (2002-09-01), Halley
patent: 6464574 (2002-10-01), Halley
patent: 6527627 (2003-03-01), Arai
patent: 2001/0049256 (2001-12-01), Arai
patent: 199312 (1917-12-01), None
patent: 846663 (1952-08-01), None
patent: 912057 (1954-05-01), None
patent: 2819828 (1978-11-01), None
patent: 3438755 (1986-04-01), None
patent: 3804962 (1989-07-01), None
patent: 3804963 (1989-07-01), None
patent: 3844520 (1989-09-01), None
patent: 3902125 (1989-12-01), None
patent: 4025511 (1991-11-01), None
patent: 4208615 (1993-02-01), None
patent: 4136567 (1993-05-01), None
patent: 4307870 (1994-09-01), None
patent: 19641534 (1998-04-01), None
patent: 19815694 (1999-10-01), None
patent: 10006481 (2001-04-01), None
patent: 19948517 (2001-04-01), None
patent: 10020103 (2001-10-01), None
patent: 8214466.4 (1983-05-01), None
patent: 2190862 (1987-12-01), None
patent: 2195275 (1988-04-01), None
patent: 2256822 (1992-12-01), None
patent: 59-43082 (1984-03-01), None
patent: HEI 4-111647 (1992-04-01), None
patent: WO 99/04416 (1999-01-01), None
patent: WO 01/82339 (2001-11-01), None
patent: WO 02/38336 (2002-05-01), None
www.majestech.com/document/EN/SaatiTech/products/Fabrics/Home.flash.html, retrieved May 29, 2003.
G&N Twinspindle, The MPS 2 R 400 Series, The Machine with Fully Enclosed Grinding Area, Increased Power Efficiency and Digital Control Concept, www.grinders-us.com, retrieved Jan. 29, 2004.
Byron Knapp, Eric Marsh, Robert Grejda, David SchalcoskySuperabrasive Grinding Process Optimization through Force Measurement, Pennsylvania State University, University Park, PA 16802, http://www.me.psu.edu/mdrl/docs/instgrind.pdf, retrieved Apr. 2, 2003.
Kassir Salman Moudrek
Spiegel Larry A.
Lebens Thomas F.
Rachuba M.
Sinsheimer, Schiebelhut & Baggett
Strasbaugh
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