Protection of oxide superconductor

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Reexamination Certificate

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C428S209000, C428S210000, C428S688000, C428S691000, C428S930000, C505S230000, C505S231000, C505S232000, C505S233000, C505S237000, C505S238000, C505S239000

Reexamination Certificate

active

06238774

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a protection of an oxide superconductor. This type of protection is particularly resistant to water and acids, and therefore, is useful for the protection of semiconductor devices using a superconductor wiring.
2. Description of the Related Art
High temperature superconductors have been developed which include [Y or La (lanthanoids)]-(Ba or Sr)—Cu—O system (T
c
=90 K), Bi—Sr—Ca—Cu—O system (T
c
=105 K), or Tl—Ba—Ca—Cu—O system (T
c
=118 K) oxide superconductors. These superconductors have a high critical temperature, e.g., higher than the boiling point of liquid nitrogen, and have opened the way to a utilization of a superconductor for superconductor magnets, superconductor wiring, SQUID, etc.
The utilization of a superconductor necessitates a processing of the superconductor, per se, or a composite having the superconductor as a constituent component; particularly electronic devices, etc., containing a superconductor are processed with water or an acid such as nitric acid, chloric acid and fluoric acid for cleaning and patterning, etc. Oxide superconductors, however, are highly soluble in water or such acids, and thus may be damaged or the superconductive properties thereof degraded, during a process using water or an acid.
In practice, it has been found difficult to control the composition or structure of an oxide superconductor in an attempt to improve the resistance of the superconductor to water or acids, as superior superconductive properties can be obtained only in a limited composition and structure range. Accordingly, the utilization of an oxide superconductor is prevented due to the difficulty of processing the same.
The main object of the present invention is to provide an oxide superconductor which is protected from the affects of water and acids.
SUMMARY OF THE INVENTION
The above and other objects, features, and advantages are attained by an oxide superconductor covered with a layer of a fluoride composed of one or more elements, said elements of said fluoride being an element composing said oxide superconductor and/or an element that can compose an oxide superconductor by replacing, at least in part, an element composing said oxide superconductor.
The composition of this oxide superconductor is not particularly limited, and includes the following:
i) an R—Ba—Cu—O system, wherein R represents yttrium or lanthanoids, and
ii) an R—Ca or Sr—Cu—O system, wherein R represents yttrium or lanthanoids.


REFERENCES:
patent: 4965244 (1990-10-01), Weaver et al.
patent: 4980339 (1990-12-01), Setsune et al.
patent: 5155094 (1992-10-01), Okabe et al.
Koinuma, Jap Journ. of Appl. Physics vol. 26, No. 5, 5-87 L763-765.*
Nakajima, Appl. Phys. Lett. 53(15) Oct. 10, 1988 pp. 1437-1439.*
Elliot, “Integrated Circuit Fabrication Technology”, McGraw Hill 1982 p. 1.*
Doss, Engineer's Guide to High Tc Superconductivity Wiley & Sons 1989, pp. 105-108.*
Appl. Phys. Letts 53(11) 1004-1006, Meyer III et al. Sep. 12, 1988.*
CA 111(20):185839g, Seki, Oxide Ceramic Superconductor with Durability, Oct. 23, 1987.

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