Protection of nozzle structures in an ink jet printhead

Details Protection of nozzle structures in an ink jet printhead Protection of nozzle structures in an ink jet printhead

2006-10-31

2006-10-31

Ahmed, Shamim (Department: 1765)

Etching a substrate: processes

Forming or treating thermal ink jet article

C216S002000, C216S067000, C438S021000, C029S890100, C347S065000

Reexamination Certificate

active

07128845

ABSTRACT:
A printhead for an ink jet printer with an array14of ink ejection nozzles22formed from MEMS techniques. To protect the delicate nozzle structures, a nozzle guard80covers the exterior surface of the array14. A corresponding array of apertures84is formed in the guard80. To attach the guard80to the silicon substrate16carrying the nozzles22, alignment formations148configured for engagement with complementary formations on a nozzle guard86. For precise registration between the nozzles22and the respective apertures86in the guard80, the alignment formations148may be formed using the same etching and deposition techniques used to form the nozzles22. To protect the fragile nozzle structures22from inadvertent contact with the struts86during assembly, the nozzles22are reinforced by sacrificial material152which subsequently removed by an oxygen plasma etch154.

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