Protection means for ridge waveguide laser structures using thic

Details Protection means for ridge waveguide laser structures using thic Protection means for ridge waveguide laser structures using thic

1992-11-05

1994-04-26

Healy, Brian

Coherent light generators

Thin film laser

372 43, H01S 330

Patent

active

053073576

ABSTRACT:
What is disclosed is a semiconductor ridge waveguide laser structure having mechanical protection of ridge element by means of a thick, multi-layer organic material. The organic material, which may be a polyimide film, is deposited over the ridge element. The present invention also provides a fabrication process for depositing the protective means on the ridge element including deposition and photolithographic steps.

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