Protection gas control method for non-sealed process chamber

Details Protection gas control method for non-sealed process chamber Protection gas control method for non-sealed process chamber

2008-07-01

2010-10-05

Jarrett, Ryan A (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Mechanical control system

C700S204000

Reexamination Certificate

active

07809474

ABSTRACT:
A protection gas control method for a non-sealed process chamber including the steps of activating a protection gas control apparatus while coupling a protection gas to a plurality of throttle valves, opening all the throttle valves for a pre-determined period of time, closing at least one of the throttle valves if the oxygen concentration in the chamber is smaller than or equal to a first target value, determining whether the oxygen concentration in the chamber is smaller than or equal to a second target value, and stopping supplying the protection gas when the temperature of the chamber is lower than a pre-determined temperature.

REFERENCES:
patent: 5158746 (1992-10-01), Suzuki et al.
patent: 5385462 (1995-01-01), Kodama et al.
patent: 5586587 (1996-12-01), Leininger et al.

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