Protected switch and techniques to manufacture the same

Details Protected switch and techniques to manufacture the same Protected switch and techniques to manufacture the same

2003-12-16

2004-11-30

Friedhofer, Michael (Department: 2832)

Electricity: circuit makers and breakers

Electrostrictive or electrostatic

C200S263000

Reexamination Certificate

active

06825428

ABSTRACT:

FIELD
The subject matter disclosed herein generally relates to micromechanical system (MEMS) switches.
DESCRIPTION OF RELATED ART
The use of MEMS switches has been found to be advantageous over traditional solid-state switches. For example, MEMS switches have been found to have superior power efficiency, low insertion loss, and excellent electrical isolation. However, a switch is often required to perform billions of switching cycles. Over time, the metal contacts may wear down thereby increasing contact resistance and leading to reliability issues.


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Ma, Qing et al., U.S. patent application Ser. No. 10/194,096, entitled “Microelectromechanical (MEMS) Switching Apparatus”, filed Jul. 11, 2002.
Ma, Quing et al., U.S. patent application Ser. No. 10/681,550 (a continuation of U.S. patent application Ser. No. 10/194,096), entitled “Microelectromechanical (MEMS) Switching Apparatus”, filed Oct. 7, 2003, and preliminary amendment thereto.
Ma, Qing et al., U.S. patent application Ser. No. 10/389,725 (a divisional of patent No. 6,621,022), entitled “Reliable Opposing Contact Structure and Techniques to Fabricate the Same”, filed Mar. 12, 2003, and preliminary amendment thereto.

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