Fluid handling – Flow affected by fluid contact – energy field or coanda effect – Means to regulate or vary operation of device
Reexamination Certificate
2008-05-06
2008-05-06
Siconolfi, Robert A. (Department: 3683)
Fluid handling
Flow affected by fluid contact, energy field or coanda effect
Means to regulate or vary operation of device
C137S833000, C137S554000, C251S011000, C303S119200
Reexamination Certificate
active
11075057
ABSTRACT:
The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet ports. The second layer, doped to have a low resistivity and bonded between the first and third layers, defines a cavity having a flow area to permit fluid flow between the inlet and outlet ports. The second layer further defines an actuatable displaceable member, and one or more thermal actuators for actuating the displaceable member to a position between and including an open and a closed position to permit or occlude fluid flow. The third layer provides one wall of the cavity and provides electrical contacts for electrically heating the thermally expandable actuators. The thermal actuators and the displaceable member have high aspect ratios and are formed by deep reactive ion etching such that they are displaceable in the plane of the second layer while being very stiff out of the plane. Thus, both actuation and displacement of the displaceable member are in the plane of the layer.
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Fuller Edward Nelson
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GE Novasensor, Inc.
Kelsey-Hayes Company
Nguyen Vu Q.
Siconolfi Robert A.
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