Projector for exposing photosensitive substrate

Details Projector for exposing photosensitive substrate Projector for exposing photosensitive substrate

1994-04-19

1995-07-18

Gellner, Michael L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 71, 430 5, G03B 2742

Patent

active

054346479

ABSTRACT:
A projector for exposing a photosensitive substrate includes a mask having an exposure pattern thereon composed of half-transparent material which causes a phase difference among lights passing therethrough, a first optical system for illuminating the mask, a second optical system for projecting the exposure pattern on the photosensitive substrate, and a device, disposed ahead of the first optical system, for controlling a quantity of illumination light to be irradiated in a plurality of areas of the first optical system.

REFERENCES:
patent: 5144362 (1992-09-01), Kamon et al.
patent: 5264898 (1993-11-01), Kamon et al.
patent: 5305054 (1994-04-01), Suzuki et al.
patent: 5335044 (1994-08-01), Shiraishi
patent: 5345292 (1994-09-01), Shiozawa et al.
patent: 5348837 (1994-09-01), Fukuda et al.

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