Projector and projection method

Details Projector and projection method Projector and projection method

2006-06-20

2006-06-20

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

C359S238000

Reexamination Certificate

active

07064880

ABSTRACT:
A projector includes: a spatial light modulator, which receives pattern data, representing a pattern to be formed on a projection plane, and which spatially modulates incoming light in accordance with the pattern data; and a projection optical system for projecting the light, which has been reflected from the spatial light modulator, onto the projection plane in a reduced size. The spatial light modulator includes: an array of micromirrors to be driven in accordance with the pattern data; a substrate to support the array of micromirrors thereon; and a driving section, which is able to change the tilt of each micromirror with respect to the substrate and the displacement of the micromirror perpendicularly to the substrate on a micromirror-by-micromirror basis.

REFERENCES:
patent: 6363504 (2002-03-01), Rhodes et al.
patent: 2004/0081351 (2004-04-01), Ganot et al.
patent: 2005/0088719 (2005-04-01), Patel et al
patent: 10-112579 (1998-04-01), None
Durr, et al., “Characterization of Spatial Light Modulators for Micro Lithography”,Proceedings of SPIE, vol. 4985, pp. 211-221, (2003).

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