Optics: image projectors – Miscellaneous
Patent
1990-12-24
1992-08-11
Cuchlinski, Jr., William A.
Optics: image projectors
Miscellaneous
353101, 355 30, 355 53, 355 55, G03B 2734
Patent
active
051373491
ABSTRACT:
In a projection-type optical apparatus in which a projection optical system projects an image of an object upon a substrate, a position detecting sensor mechanically connected to the projection optical system detects the position of the projection optical system relative to the substrate along the optical axis of the projection optical system. A displacement measuring device measures relative displacement between the position detecting sensor and the projection optical system along the optical axis. The substrate is brought into coincidence with an optimum image forming plane of the projection optical system on the basis of the position detected by the position detecting sensor and the displacement measured by the displacement measuring device.
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Hatasawa Masato
Suzuki Kazuaki
Taniguchi Tetsuo
Tsuji Toshihiko
Cuchlinski Jr. William A.
Dowling William C.
Nikon Corporation
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