Projection printing apparatus for printing a photomask

Details Projection printing apparatus for printing a photomask Projection printing apparatus for printing a photomask

1983-01-18

1985-01-08

Mathews, A. A.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

355 62, 356150, 356401, G03B 2752, G01B 1126

Patent

active

044924593

ABSTRACT:
A projection printing apparatus uses different lens systems during alignment and during printing. The lens system for alignment causes an alignment mark on mask to be imaged on the alignment mark on a wafer when the mask is illuminated by non-sensitizing light. The lens system for printing causes the circuit pattern of the mask to be illuminated by sensitizing light to be imaged on the wafer. The whole or part of the lens system for alignment is positioned outside of the circuit pattern image forming light path so as not to adversely affect the circuit pattern image on the wafer when the mask is illuminated by the sensitizing light.

REFERENCES:
patent: 3897138 (1975-07-01), Kano
patent: 4170418 (1979-10-01), Aiuchi et al.
patent: 4251160 (1981-02-01), Bouwhuis et al.
patent: 4269505 (1981-05-01), Mayer
patent: 4295735 (1981-10-01), Lacombat et al.

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