Projection-printing apparatus

Details Projection-printing apparatus Projection-printing apparatus

1982-01-20

1983-12-27

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

355 53, 355 73, 355 76, G03B 2752, G03B 2770

Patent

active

044227540

ABSTRACT:
A projection-printing apparatus moves at least one of a mask and a wafer with precise rectilinearity along a guide relative to an optical system for projecting the image of the mask upon the wafer, and in a plane perpendicular to the optical axis of the optical system whereby the image of the mask is printed on the wafer.

REFERENCES:
patent: 3722996 (1973-03-01), Fox
patent: 3984186 (1976-10-01), Momose et al.
patent: 4040736 (1977-08-01), Johannsmeier
patent: 4346987 (1982-08-01), Jalichandra et al.

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