Projection optics for microlithography

Details Projection optics for microlithography Projection optics for microlithography

2011-04-19

2011-04-19

Mathews, Alan A (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C359S366000, C359S838000, C359S859000

Reexamination Certificate

active

07929114

ABSTRACT:
A projection optics for microlithography, which images an object field in an object plane into an image field in an image plane, where the projection optics include at least one curved mirror and including at least one refractive subunit, as well as related systems, components, methods and products prepared by such methods, are disclosed.

REFERENCES:
patent: 6000798 (1999-12-01), Chipman et al.
patent: 6266389 (2001-07-01), Murayama et al.
patent: 6353470 (2002-03-01), Dinger
patent: 6590718 (2003-07-01), Fuerter et al.
patent: 6660552 (2003-12-01), Payne et al.
patent: 6665126 (2003-12-01), Shafer et al.
patent: 6710917 (2004-03-01), Mann et al.
patent: 6902283 (2005-06-01), Dinger
patent: 6922291 (2005-07-01), Sunaga et al.
patent: 6947210 (2005-09-01), Terasawa
patent: 7070289 (2006-07-01), Sasaki et al.
patent: 7072102 (2006-07-01), McGuire, Jr.
patent: 7114818 (2006-10-01), Minakata
patent: 2002/0012100 (2002-01-01), Shafer
patent: 2003/0002023 (2003-01-01), Bunau et al.
patent: 2004/0189968 (2004-09-01), Terasawa
patent: 2005/0134980 (2005-06-01), Mann et al.
patent: 2005/0190435 (2005-09-01), Shafer et al.
patent: 2006/0198018 (2006-09-01), Shafer et al.
patent: 2006/0284113 (2006-12-01), Chang et al.
patent: 2007/0195317 (2007-08-01), Schotter et al.
patent: 102 12 405 (2002-10-01), None
patent: 101 20 446 (2002-11-01), None
patent: 103 59 576 (2005-07-01), None
patent: 1 434 093 (2004-06-01), None
patent: 2002-139672 (2002-05-01), None
patent: 2004-512552 (2004-04-01), None
patent: 2004-516500 (2004-06-01), None
patent: 2004-214242 (2004-07-01), None
patent: 2004-525398 (2004-08-01), None
patent: WO 01/88597 (2001-11-01), None
patent: WO 02/44786 (2002-06-01), None
patent: WO 02/48796 (2002-06-01), None
patent: WO 02/056114 (2002-07-01), None

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